JPH0420491Y2 - - Google Patents
Info
- Publication number
- JPH0420491Y2 JPH0420491Y2 JP7122188U JP7122188U JPH0420491Y2 JP H0420491 Y2 JPH0420491 Y2 JP H0420491Y2 JP 7122188 U JP7122188 U JP 7122188U JP 7122188 U JP7122188 U JP 7122188U JP H0420491 Y2 JPH0420491 Y2 JP H0420491Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- cleaning
- liquid
- recovery
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 96
- 239000007788 liquid Substances 0.000 claims description 95
- 238000011084 recovery Methods 0.000 claims description 44
- 239000012535 impurity Substances 0.000 claims description 28
- 238000002347 injection Methods 0.000 claims description 22
- 239000007924 injection Substances 0.000 claims description 22
- 238000001914 filtration Methods 0.000 claims description 13
- 239000002244 precipitate Substances 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 22
- 238000001816 cooling Methods 0.000 description 8
- 238000004821 distillation Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000013020 steam cleaning Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7122188U JPH0420491Y2 (en]) | 1988-05-30 | 1988-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7122188U JPH0420491Y2 (en]) | 1988-05-30 | 1988-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174019U JPH01174019U (en]) | 1989-12-11 |
| JPH0420491Y2 true JPH0420491Y2 (en]) | 1992-05-11 |
Family
ID=31296431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7122188U Expired JPH0420491Y2 (en]) | 1988-05-30 | 1988-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420491Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7250722B2 (ja) * | 2020-03-31 | 2023-04-03 | 栗田工業株式会社 | 被塗装物の洗浄装置及び洗浄方法 |
-
1988
- 1988-05-30 JP JP7122188U patent/JPH0420491Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01174019U (en]) | 1989-12-11 |
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